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Integration of III-V Nanowire Semiconductors for next Generation High Performance CMOS SOC Technologies

Deliverables

Publications

First RF characterization of InGaAs replacement metal gate (RMG) nFETs on SiGe-OI FinFETs fabricated by 3D monolithic integration

Author(s): V. Deshpande, V. Djara, E. O'Connor, D. Caimi, M. Sousa, L. Czornomaz, J. Fompeyrine, P. Hashemi, K. Balakrishnan
Published in: 2016 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Issue Yearly, 2016, Page(s) 127-130, ISBN 978-1-4673-8609-8
Publisher: IEEE
DOI: 10.1109/ULIS.2016.7440069

Self-aligned, gate-last process for vertical InAs nanowire MOSFETs on Si

Author(s): Martin Berg, Karl-Magnus Persson, Olli-Pekka Kilpi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson
Published in: 2015 IEEE International Electron Devices Meeting (IEDM), 2015, Page(s) 31.2.1-31.2.4, ISBN 978-1-4673-9894-7
Publisher: IEEE
DOI: 10.1109/IEDM.2015.7409806

Single suspended InGaAs nanowire MOSFETs

Author(s): Cezar B. Zota, Lars-Erik Wernersson, Erik Lind
Published in: 2015 IEEE International Electron Devices Meeting (IEDM), 2015, Page(s) 31.4.1-31.4.4, ISBN 978-1-4673-9894-7
Publisher: IEEE
DOI: 10.1109/IEDM.2015.7409808

Initial investigation on the impact of in situ hydrogen plasma exposure to the interface between molecular beam epitaxially grown p-Ga0.7In0.3Sb (100) and thermal atomic layer deposited (ALD) Al2O3

Author(s): Millar, D., Peralagu, U., Fu, Y.-C., Li, X., Steer, M., and Thayne, I.
Published in: WoDIM, Issue Yearly; Session 4: III-V FETs, 2016, Page(s) N/A
Publisher: http://wodim2016.imm.cnr.it/index.asp?cont=program

Balanced Drive Currents in 10–20 nm Diameter Nanowire All-III-V CMOS on Si

Author(s): Adam Jonsson, Johannes Svensson, Lars-Erik Wemersson
Published in: 2018 IEEE International Electron Devices Meeting (IEDM), 2018, Page(s) 39.3.1-39.3.4, ISBN 978-1-7281-1987-8
Publisher: IEEE
DOI: 10.1109/iedm.2018.8614685

Sub-100-nm gate-length scaling of vertical InAs/InGaAs nanowire MOSFETs on Si

Author(s): Olli-Pekka Kilpi, Johannes Svensson, Lars-Erik Wernersson
Published in: 2017 IEEE International Electron Devices Meeting (IEDM), 2017, Page(s) 17.3.1-17.3.4, ISBN 978-1-5386-3559-9
Publisher: IEEE
DOI: 10.1109/iedm.2017.8268408

Profiling border-traps by TCAD analysis of multifrequency CV-curves in Al<inf>2</inf>O<inf>3</inf>/InGaAs stacks

Author(s): E. Caruso, J. Lin, K. F. Burke, K. Cherkaoui, D. Esseni, F. Gity, S. Monaghan, P. Palestri, P. Hurley, L. Selmi
Published in: 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), 2018, Page(s) 1-4, ISBN 978-1-5386-4811-7
Publisher: IEEE
DOI: 10.1109/ulis.2018.8354757

Low-Temperature Front-Side BEOL Technology with Circuit Level Multiline Thru-Reflect-Line Kit for III-V MOSFETs on Silicon

Author(s): Stefan Andric, Lars Ohlsson, Lars-Erik Wenrersson
Published in: 2019 92nd ARFTG Microwave Measurement Conference (ARFTG), 2019, Page(s) 1-4, ISBN 978-1-5386-6599-2
Publisher: IEEE
DOI: 10.1109/arftg.2019.8637222

First demonstration of 3D SRAM through 3D monolithic integration of InGaAs n-FinFETs on FDSOI Si CMOS with inter-layer contacts

Author(s): V. Deshpande, H. Hahn, E. O'Connor, Y. Baumgartner, M. Sousa, D. Caimi, H. Boutry, J. Widiez, L. Brevard, C. Le Royer, M. Vinet, J. Fompeyrine, L. Czornomaz
Published in: 2017 Symposium on VLSI Technology, 2017, Page(s) T74-T75, ISBN 978-4-86348-605-8
Publisher: IEEE
DOI: 10.23919/vlsit.2017.7998205

Integration of III–V nanowires for the next RF- and logic technology generation

Author(s): Lars-Erik Wernersson
Published in: 2017 International Symposium on VLSI Technology, Systems and Application (VLSI-TSA), 2017, Page(s) 1-2, ISBN 978-1-5090-5805-1
Publisher: IEEE
DOI: 10.1109/vlsi-tsa.2017.7942489

A scaled replacement metal gate InGaAs-on-Insulator n-FinFET on Si with record performance

Author(s): H. Hahn, V. Deshpande, E. Caruso, S. Sant, E. O'Connor, Y. Baumgartner, M. Sousa, D. Caimi, A. Olziersky, P. Palestri, L. Selmi, A. Schenk, L. Czornomaz
Published in: 2017 IEEE International Electron Devices Meeting (IEDM), 2017, Page(s) 17.5.1-17.5.4, ISBN 978-1-5386-3559-9
Publisher: IEEE
DOI: 10.1109/iedm.2017.8268410

Hybrid InGaAs/SiGe CMOS circuits with 2D and 3D monolithic integration

Author(s): V. Deshpande, H. Hahn, V. Djara, E. O'Connor, D. Caimi, M. Sousa, J. Fompeyrine, L. Czornomaz
Published in: 2017 47th European Solid-State Device Research Conference (ESSDERC), 2017, Page(s) 244-247, ISBN 978-1-5090-5978-2
Publisher: IEEE
DOI: 10.1109/essderc.2017.8066637

InGaAs FinFETs 3D Sequentially Integrated on FDSOI Si CMOS with Record Perfomance

Author(s): C. Convertino, C. B. Zota, D. Caimi, M. Sousa, L. Czornomaz
Published in: 2018 48th European Solid-State Device Research Conference (ESSDERC), 2018, Page(s) 162-165, ISBN 978-1-5386-5401-9
Publisher: IEEE
DOI: 10.1109/essderc.2018.8486862

First InGaAs lateral nanowire MOSFET RF noise measurements and model

Author(s): Lars Ohlsson, Fredrik Lindelow, Cezar B. Zota, Matthias Ohlrogge, Thomas Merkle, Lars-Erik Wernersson, Erik Lind
Published in: 2017 75th Annual Device Research Conference (DRC), 2017, Page(s) 1-2, ISBN 978-1-5090-6328-4
Publisher: IEEE
DOI: 10.1109/drc.2017.7999451

High Performance Quantum Well InGaAs-On-Si MOSFETs With sub-20 nm Gate Length For RF Applications

Author(s): C. B. Zota, C. Convertino, Y. Baumgartner, M. Sousa, D. Caimi, L. Czornomaz
Published in: 2018 IEEE International Electron Devices Meeting (IEDM), 2018, Page(s) 39.4.1-39.4.4, ISBN 978-1-7281-1987-8
Publisher: IEEE
DOI: 10.1109/iedm.2018.8614530

InGaAs-on-Insulator FinFETs with Reduced Off-Current and Record Performance

Author(s): C. Convertino, C. Zota, S. Sant, F. Eltes, M. Sousa, D. Caimi, A. Schenk, L. Czornomaz
Published in: 2018 IEEE International Electron Devices Meeting (IEDM), 2018, Page(s) 39.2.1-39.2.4, ISBN 978-1-7281-1987-8
Publisher: IEEE
DOI: 10.1109/iedm.2018.8614640

Investigation of InAs/GaSb tunnel diodes on SOI

Author(s): C. Convertino, D. Cutaia, H. Schmid, N. Bologna, P. Paletti, A.M. Ionescu, H. Riel, K. E. Moselund
Published in: 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), 2017, Page(s) 148-151, ISBN 978-1-5090-5313-1
Publisher: IEEE
DOI: 10.1109/ulis.2017.7962586

Properties of III–V nanowires: MOSFETs and TunnelFETs

Author(s): Lars-Erik Wernersson
Published in: 2017 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), 2017, Page(s) 99-100, ISBN 978-1-5090-5313-1
Publisher: IEEE
DOI: 10.1109/ulis.2017.7962611

A 250 GHz millimeter wave amplifier MMIC based on 30 nm metamorphic InGaAs MOSFET technology

Author(s): Arnulf Leuther, Matthias Ohlrogge, Lukas Czornomaz, Thomas Merkle, Frank Bernhardt, Axel Tessmann
Published in: 2017 12th European Microwave Integrated Circuits Conference (EuMIC), 2017, Page(s) 130-133, ISBN 978-2-87487-048-4
Publisher: IEEE
DOI: 10.23919/eumic.2017.8230677

Monolithic integration of multiple III-V semiconductors on Si

Author(s): H. Schmid, B. Mayer, J. Gooth, S. Wirths, L. Czornomaz, H. Riel, S. Mauthe, C. Convertino, K. E. Moselund
Published in: 2017 IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference (S3S), 2017, Page(s) 1-3, ISBN 978-1-5386-3766-1
Publisher: IEEE
DOI: 10.1109/s3s.2017.8309200

InGaAs-on-Si (Ge) 3D Monolithic Technology for CMOS and More-than-Moore

Author(s): V. Deshpande, V. Djara, T. Morf, P. Hashemi, E. O’Connor, K. Balakrishnan, D. Caimi, M. Sousa, L. Czornomaz and J. Fompeyrine
Published in: Int'l Conf. on Solid State Devices and Materials (SSDM),, Issue Book of Extended Abstracts in 2016, 2016
Publisher: SSDM

80 nm InGaAs MOSFET W-band low noise amplifier

Author(s): Amulf Leuther, Matthias Ohlrogge, Lukas Czornomaz, Thomas Merkle, Frank Bernhardt, Axel Tessmann
Published in: 2017 IEEE MTT-S International Microwave Symposium (IMS), 2017, Page(s) 1133-1136, ISBN 978-1-5090-6360-4
Publisher: IEEE
DOI: 10.1109/mwsym.2017.8058798

Vertical heterojunction InAs/InGaAs nanowire MOSFETs on Si with I<inf>on</inf> = 330 μA/μm at I<inf>off</inf> = 100 nA/μm and V<inf>D</inf> = 0.5 V

Author(s): Olli-Pekka Kilpi, Jun Wu, Johannes Svensson, Erik Lind, Lars-Erik Wernersson
Published in: 2017 Symposium on VLSI Technology, 2017, Page(s) T36-T37, ISBN 978-4-86348-605-8
Publisher: IEEE
DOI: 10.23919/vlsit.2017.7998191

High Gain 220 - 275 GHz Amplifier MMICs Based on Metamorphic 20 nm InGaAs MOSFET Technology

Author(s): A. Tessmann, A. Leuther, F. Heinz, F. Bernhardt, H. Massler
Published in: 2018 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS), 2018, Page(s) 156-159, ISBN 978-1-5386-6502-2
Publisher: IEEE
DOI: 10.1109/bcicts.2018.8550836

InGaAs-on-Insulator MOSFETs Featuring Scaled Logic Devices and Record RF Performance

Author(s): C. B. Zota, C. Convertino, V. Deshpande, T. Merkle, M. Sousa, D. Caimi, L. Czomomaz
Published in: 2018 IEEE Symposium on VLSI Technology, 2018, Page(s) 165-166, ISBN 978-1-5386-4218-4
Publisher: IEEE
DOI: 10.1109/vlsit.2018.8510631

Monolithic integration of multiple III-V semiconductors on Si for MOSFETs and TFETs

Author(s): H. Schmid, D. Cutaia, J. Gooth, S. Wirths, N. Bologna, K. E. Moselund, H. Riel
Published in: 2016 IEEE International Electron Devices Meeting (IEDM), Issue Yearly, 2016, Page(s) 3.6.1-3.6.4, ISBN 978-1-5090-3902-9
Publisher: IEEE
DOI: 10.1109/IEDM.2016.7838340

InGaAs tri-gate MOSFETs with record on-current

Author(s): Cezar B. Zota, Fredrik Lindelow, Lars-Erik Wernersson, Erik Lind
Published in: 2016 IEEE International Electron Devices Meeting (IEDM), 2016, Page(s) 3.2.1-3.2.4, ISBN 978-1-5090-3902-9
Publisher: IEEE
DOI: 10.1109/IEDM.2016.7838336

InGaAs nanowire MOSFETs with I<inf>ON</inf> = 555 µA/µm at I<inf>OFF</inf> = 100 nA/µm and V<inf>DD</inf> = 0.5 V

Author(s): Cezar B. Zota, Fredrik Lindelow, Lars-Erik Wernersson, Erik Lind
Published in: 2016 IEEE Symposium on VLSI Technology, Issue Yearly, 2016, Page(s) 1-2, ISBN 978-1-5090-0638-0
Publisher: IEEE
DOI: 10.1109/VLSIT.2016.7573418

Electrical Characterization and Modeling of Gate-Last Vertical InAs Nanowire MOSFETs on Si

Author(s): Martin Berg, Olli-Pekka Kilpi, Karl-Magnus Persson, Johannes Svensson, Markus Hellenbrand, Erik Lind, Lars-Erik Wernersson
Published in: IEEE Electron Device Letters, Issue Volume:PP Issue: 99 , 2016, Page(s) 1-1, ISSN 0741-3106
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/LED.2016.2581918

High-Performance Lateral Nanowire InGaAs MOSFETs with Improved On-Current

Author(s): Cezar Zota, Lars-Erik Wernersson, Erik Lind
Published in: IEEE Electron Device Letters, 2016, Page(s) 1-1, ISSN 0741-3106
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/LED.2016.2602841

High-Frequency InGaAs Tri-gate MOSFETs with fmax of 400 GHz

Author(s): Cezar Zota, Fredrik Lindelöw, Lars-Erik Wernersson, Erik Lind
Published in: Electronics Letters, 2016, ISSN 0013-5194
Publisher: Institute of Electrical Engineers
DOI: 10.1049/el.2016.3108

Electrical properties of metal/Al 2 O 3 /In 0.53 Ga 0.47 As capacitors grown on InP

Author(s): Philippe Ferrandis, Mathilde Billaud, Julien Duvernay, Mickael Martin, Alexandre Arnoult, Helen Grampeix, Mikael Cassé, Hervé Boutry, Thierry Baron, Maud Vinet, Gilles Reimbold
Published in: Journal of Applied Physics, Issue 123/16, 2018, Page(s) 161534, ISSN 0021-8979
Publisher: American Institute of Physics
DOI: 10.1063/1.5007920

Low-Frequency Noise in III–V Nanowire TFETs and MOSFETs

Author(s): Markus Hellenbrand, Elvedin Memisevic, Martin Berg, Olli-Pekka Kilpi, Johannes Svensson, Lars-Erik Wernersson
Published in: IEEE Electron Device Letters, Issue 38/11, 2017, Page(s) 1520-1523, ISSN 0741-3106
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/led.2017.2757538

A Self-Aligned Gate-Last Process Applied to All-III–V CMOS on Si

Author(s): Adam Jonsson, Johannes Svensson, Lars-Erik Wernersson
Published in: IEEE Electron Device Letters, Issue 39/7, 2018, Page(s) 935-938, ISSN 0741-3106
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/led.2018.2837676

Low-frequency noise in nanowire and planar III-V MOSFETs

Author(s): Markus Hellenbrand, Olli-Pekka Kilpi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson
Published in: Microelectronic Engineering, 2019, Page(s) 110986, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2019.110986

Examining the relationship between capacitance-voltage hysteresis and accumulation frequency dispersion in InGaAs metal-oxide-semiconductor structures based on the response to post-metal annealing

Author(s): Jun Lin, Scott Monaghan, Karim Cherkaoui, Ian M. Povey, Brendan Sheehan, Paul K. Hurley
Published in: Microelectronic Engineering, Issue 178, 2017, Page(s) 204-208, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2017.05.020

InGaAs FinFETs Directly Integrated on Silicon by Selective Growth in Oxide Cavities

Author(s): Clarissa Convertino, Cezar Zota, Heinz Schmid, Daniele Caimi, Marilyne Sousa, Kirsten Moselund, Lukas Czornomaz
Published in: Materials, Issue 12/1, 2019, Page(s) 87, ISSN 1996-1944
Publisher: MDPI Open Access Publishing
DOI: 10.3390/ma12010087

Facet-selective group-III incorporation in InGaAs template assisted selective epitaxy

Author(s): Mattias Borg, Lynne Gignac, John Bruley, Andreas Malmgren, Saurabh Sant, Clarissa Convertino, Marta D Rossell, Marilyne Sousa, Chris Breslin, Heike Riel, Kirsten E Moselund, Heinz Schmid
Published in: Nanotechnology, Issue 30/8, 2019, Page(s) 084004, ISSN 0957-4484
Publisher: Institute of Physics Publishing
DOI: 10.1088/1361-6528/aaf547

High frequency III–V nanowire MOSFETs

Author(s): Erik Lind
Published in: Semiconductor Science and Technology, Issue 31/9, 2016, Page(s) 093005, ISSN 0268-1242
Publisher: Institute of Physics Publishing
DOI: 10.1088/0268-1242/31/9/093005

Electrical Properties of Vertical InAs/InGaAs Heterostructure MOSFETs

Author(s): Olli-Pekka Kilpi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson
Published in: IEEE Journal of the Electron Devices Society, Issue 7, 2019, Page(s) 70-75, ISSN 2168-6734
Publisher: Institute of Electrical and Electronics Engineers Inc.
DOI: 10.1109/jeds.2018.2878659

20-nm In0.8Ga0.2As MOSHEMT MMIC Technology on Silicon

Author(s): Axel Tessmann, Arnulf Leuther, Felix Heinz, Frank Bernhardt, Laurenz John, Hermann Massler, Lukas Czornomaz, Thomas Merkle
Published in: IEEE Journal of Solid-State Circuits, 2019, Page(s) 1-8, ISSN 0018-9200
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/jssc.2019.2915161

Vertical InAs/InGaAs Heterostructure Metal–Oxide–Semiconductor Field-Effect Transistors on Si

Author(s): Olli-Pekka Kilpi, Johannes Svensson, Jun Wu, Axel R. Persson, Reine Wallenberg, Erik Lind, Lars-Erik Wernersson
Published in: Nano Letters, Issue 17/10, 2017, Page(s) 6006-6010, ISSN 1530-6984
Publisher: American Chemical Society
DOI: 10.1021/acs.nanolett.7b02251

High-Frequency Quantum Well InGaAs-on-Si MOSFETs With Scaled Gate Lengths

Author(s): Cezar B. Zota, Clarissa Convertino, Marilyne Sousa, Daniele Caimi, Kirsten Moselund, Lukas Czornomaz
Published in: IEEE Electron Device Letters, Issue 40/4, 2019, Page(s) 538-541, ISSN 0741-3106
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/led.2019.2902519

Demonstration of 3-D SRAM Cell by 3-D Monolithic Integration of InGaAs n-FinFETs on FDSOI CMOS With Interlayer Contacts

Author(s): Veeresh Deshpande, H. Hahn, E. O'Connor, Y. Baumgartner, D. Caimi, M. Sousa, H. Boutry, J. Widiez, L. Brevard, C. Le Royer, M. Vinet, J. Fompeyrine, L. Czornomaz
Published in: IEEE Transactions on Electron Devices, Issue 64/11, 2017, Page(s) 4503-4509, ISSN 0018-9383
Publisher: Institute of Electrical and Electronics Engineers
DOI: 10.1109/ted.2017.2755662

DC and RF characterization of InGaAs replacement metal gate (RMG) nFETs on SiGe-OI FinFETs fabricated by 3D monolithic integration

Author(s): V. Deshpande, V. Djara, E. O'Connor, P. Hashemi, K. Balakrishnan, D. Caimi, M. Sousa, L. Czornomaz, J. Fompeyrine
Published in: Solid-State Electronics, Issue 128, 2017, Page(s) 87-91, ISSN 0038-1101
Publisher: Pergamon Press Ltd.
DOI: 10.1016/j.sse.2016.10.034

High-performance InGaAs FinFETs with raised source/drain extensions

Author(s): Clarissa Convertino, Cezar B. Zota, Daniele Caimi, Marilyne Sousa, Kirsten E. Moselund, Lukas Czornomaz
Published in: Japanese Journal of Applied Physics, Issue 58/8, 2019, Page(s) 080901, ISSN 0021-4922
Publisher: IOP Publishing

High-Mobility GaSb Nanostructures Cointegrated with InAs on Si

Author(s): Mattias Borg, Heinz Schmid, Johannes Gooth, Marta D. Rossell, Davide Cutaia, Moritz Knoedler, Nicolas Bologna, Stephan Wirths, Kirsten E. Moselund, Heike Riel
Published in: ACS Nano, Issue 11/3, 2017, Page(s) 2554-2560, ISSN 1936-0851
Publisher: American Chemical Society
DOI: 10.1021/acsnano.6b04541

Inversion in the In 0.53 Ga 0.47 As metal-oxide-semiconductor system: Impact of the In 0.53 Ga 0.47 As doping concentration

Author(s): É. O'Connor, K. Cherkaoui, S. Monaghan, B. Sheehan, I. M. Povey, P. K. Hurley
Published in: Applied Physics Letters, Issue 110/3, 2017, Page(s) 032902, ISSN 0003-6951
Publisher: American Institute of Physics
DOI: 10.1063/1.4973971

Impact of doping and diameter on the electrical properties of GaSb nanowires

Author(s): Aein S. Babadi, Johannes Svensson, Erik Lind, Lars-Erik Wernersson
Published in: Applied Physics Letters, Issue 110/5, 2017, Page(s) 053502, ISSN 0003-6951
Publisher: American Institute of Physics
DOI: 10.1063/1.4975374

Uniting III-V Tunnel FETs with Silicon

Author(s): Davide Cutaia, K. Moselund, H. Schmid, M. Borg, H. Riel
Published in: Compound Semiconductor, Issue 23 (1), 2017, Page(s) 38-42, ISSN 2042-7328
Publisher: Angel Business Communications

Three-dimensional monolithic integration of III-V and Si(Ge) FETs for hybrid CMOS and beyond

Author(s): V. Deshpande, V. Djara, E. O'Connor, P. Hashemi, T. Morf, K. Balakrishnan, D. Caimi, M. Sousa, J. Fompeyrine, L. Czornomaz
Published in: Japanese Journal of Applied Physics, Issue vol 56, 2017, Page(s) 04CA05, ISSN 1347-4065
Publisher: Institute of Physics
DOI: 10.7567/JJAP.56.04CA05

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