Novel approach to Area selective Deposition for BEOL Interconnect Applications

Project Information

NADIA

Grant agreement ID: 888163

DOI

10.3030/888163

Project closed

EC signature date 6 April 2020

Start date 1 September 2020

End date 31 August 2022

Funded under

• EXCELLENT SCIENCE - Marie Skłodowska-Curie Actions

Total cost

€ 178 320,00

EU contribution

€ 178 320,00

Coordinated by

INTERUNIVERSITAIR MICRO-ELECTRONICA CENTRUM
Belgium

CORDIS provides links to public deliverables and publications of HORIZON projects.

Links to deliverables and publications from FP7 projects, as well as links to some specific result types such as dataset and software, are dynamically retrieved from OpenAIRE .

Publications

Peer reviewed articles (3)

Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies

Author(s): Chery, Emmanueal; Brady-Boyd, Anita; Lin, Yuyuan; Grimes, Michael; Springer, David; Slabbekoorn, John; Walsby, Edward; Croes, Kristof; Beyne, Eric
Published in: Microelectron. Eng., Issue 01679317, 2022, ISSN 0167-9317
Publisher: Elsevier BV
DOI: 10.1016/j.mee.2022.111896

Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three- Dimensional (3D) Packaging

Author(s): Brady-Boyd, Anita; Chery, Emmanuel; Armini, Silvia
Published in: J. Phys. Chem. Lett., Issue 19487185, 2022, ISSN 1948-7185
Publisher: American Chemical Society
DOI: 10.1021/acs.jpclett.2c02080

The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Area-Selective Atomic Layer Deposition

Author(s): Brady-Boyd, Anita; O' Connor, Robert; Armini, Silvia; Selvaraju, Venkateswaran; Pasquali, Mattia; Hughes, Greg; Bogan, Justin
Published in: Crossref, Issue 01694332, 2022, ISSN 0169-4332
Publisher: Elsevier BV
DOI: 10.1016/j.apsusc.2022.152679