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Novel approach to Area selective Deposition for BEOL Interconnect Applications

Publicaciones

Vapor deposited thin organic–inorganic capping layers preventing copper line oxidation in polymer-based RDL technologies

Autores: Chery, Emmanueal; Brady-Boyd, Anita; Lin, Yuyuan; Grimes, Michael; Springer, David; Slabbekoorn, John; Walsby, Edward; Croes, Kristof; Beyne, Eric
Publicado en: Microelectron. Eng., Edición 01679317, 2022, ISSN 0167-9317
Editor: Elsevier BV
DOI: 10.1016/j.mee.2022.111896

Investigating the Efficacy of Hafnium Dioxide Barrier Layers to Halt Copper Oxide Formation in Redistribution Layers for Three- Dimensional (3D) Packaging

Autores: Brady-Boyd, Anita; Chery, Emmanuel; Armini, Silvia
Publicado en: J. Phys. Chem. Lett., Edición 19487185, 2022, ISSN 1948-7185
Editor: American Chemical Society
DOI: 10.1021/acs.jpclett.2c02080

The Role of Atomic Oxygen in the Decomposition of Self-Assembled Monolayers During Area-Selective Atomic Layer Deposition

Autores: Brady-Boyd, Anita; O' Connor, Robert; Armini, Silvia; Selvaraju, Venkateswaran; Pasquali, Mattia; Hughes, Greg; Bogan, Justin
Publicado en: Crossref, Edición 01694332, 2022, ISSN 0169-4332
Editor: Elsevier BV
DOI: 10.1016/j.apsusc.2022.152679

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