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Contenuto archiviato il 2024-04-16

INTERFACE PHENOMENA OF THIN FILM AMORPHOUS AND MICROCRYSTALL INE SILICON LAYERS WITH SINGLE CRYSTALLINE SILICON SUBSTRATE S

Obiettivo



This project studies the interface of amorphous or microcrystalline silicon thin film with single crystalline silicon substrates. Different pre-deposition, deposition and post-deposition technologies are used together with many physico-chemical and electrical characterization techniques. The purpose is to optimize the process parameters from the feedback data of the different analyses in order to obtain non-crystalline or epitaxially structured thin layers for microelectronic applications.

Argomento(i)

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Invito a presentare proposte

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Meccanismo di finanziamento

CSC - Cost-sharing contracts

Coordinatore

INTERUNIVERSITAIR MIKRO-ELEKTRONICA CENTRUM VZW
Contributo UE
Nessun dato
Indirizzo
75,Kapeldreef 75
3001 HEVERLEE
Belgio

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Costo totale
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Partecipanti (2)