Periodic Reporting for period 1 - EMInstr (Development of a New Wavelength Scanning Interferometer for Embedded Metrology)
Okres sprawozdawczy: 2015-04-01 do 2016-03-31
The aim of the EMInstr project was to develop one of the research outcomes (a lab prototype of a wavelength scanning interferometer) from the ERC-2008-ADG 228117 SURFUND project into a fully functioning commercial instrument. This has involved a number of stages including: verification/validation of the lab prototype, technical optimisation, development of a second generation lab prototype, technology licensing/agreement and finally an industrial pre-product prototype, ‘Arinna’ which will be marketed commercially by IBS BV (Netherlands).
During the EMInstr project, an optimisation study aimed at enhancing the performance of a new wavelength scanning interferometer (NWSI) was carried out. The work aimed to ensure that the instrument could achieve robust and precise nano-scale measurement. Signal processing, design modifications and system refinements took place and as a result, three second generation lab prototypes have been built and are currently located at NPL (the UK National Measurement Institute), the Centre for Process Innovation (the UK Capatult Centre for Printed Electronics) and the University of Huddersfield’s Nano Lab.
Specific activities undertaken included:
1. Carrying out structure and freeform surface measurement by using the NWSI to verify precision, accuracy, repeatability and stability.
2. Development of the NWSI calibration procedure, and optimisation of the vertical resolution.
3. In conjunction with FP7 280581 NanoMend, the NWSI system has been implemented at CPI (Centre for Process Innovation) as a proof of concept sensor for the detection of defects in polymer film coated with atomic layer deposited Al2O3 vapour barrier layers.
During the EMInstr project, the University of Huddersfield has negotiated a commercialisation agreement with the industrial partner IBS BV resulting in the assignment of the patent WO 2010 082066 A2 (PCT/GB2010/050063 and US2012026508 (A1) ) originally owned by University. A pre-product prototype, named ‘Arinna’ instrument was released by IBS BV in 2015 and it is anticipated that the new instrument will be commercially available in 2016.
During the EMInstr project, an optimisation study aimed at enhancing the performance of a new wavelength scanning interferometer (NWSI) was carried out. The work aimed to ensure that the instrument could achieve robust and precise nano-scale measurement. Signal processing, design modifications and system refinements took place and as a result, three second generation lab prototypes have been built and are currently located at NPL (the UK National Measurement Institute), the Centre for Process Innovation (the UK Capatult Centre for Printed Electronics) and the University of Huddersfield’s Nano Lab.
Specific activities undertaken included:
1. Carrying out structure and freeform surface measurement by using the NWSI to verify precision, accuracy, repeatability and stability.
2. Development of the NWSI calibration procedure, and optimisation of the vertical resolution.
3. In conjunction with FP7 280581 NanoMend, the NWSI system has been implemented at CPI (Centre for Process Innovation) as a proof of concept sensor for the detection of defects in polymer film coated with atomic layer deposited Al2O3 vapour barrier layers.
During the EMInstr project, the University of Huddersfield has negotiated a commercialisation agreement with the industrial partner IBS BV resulting in the assignment of the patent WO 2010 082066 A2 (PCT/GB2010/050063 and US2012026508 (A1) ) originally owned by University. A pre-product prototype, named ‘Arinna’ instrument was released by IBS BV in 2015 and it is anticipated that the new instrument will be commercially available in 2016.